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Jing Chuan
at Institute of Optics and Electronics CAS
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Publications (2)
Proceedings Article | 9 January 2023 Paper
Absolute wavefront measurement of lithography projection lens using random averaging method
Proceedings Volume 12507, 125072F (2023) https://doi.org/10.1117/12.2656462
KEYWORDS: Calibration, Spherical lenses, Wavefronts, Monochromatic aberrations, Optical spheres, Zemax, Measurement devices, Interferometers, Lithography, Glasses
Proceedings Article | 13 December 2021 Paper
Image quality compensation via tolerance sensitivity matrix method in lithography
Chao Yang, Xianchang Zhu, Jing Chuan, Xiaolong Cheng, Haifeng Sun, Song Hu
Proceedings Volume 12073, 120730H (2021) https://doi.org/10.1117/12.2626166
KEYWORDS: Tolerancing, Objectives, Image quality, Mirrors, Distortion, Projection lithography, Lithography, Imaging systems, Code v, Motion analysis
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