Dr. Jukka Viheriälä Profile

Dr. Jukka Viheriälä

at Tampere Univ

SPIE Involvement:

Author

Publications (35)

Proceedings Article | 13 March 2024 Presentation

High performance hybrid integrated 2-3 µm wavelength lasers for gas- and bio-sensing

Jukka Viheriälä, Samu-Pekka Ojanen, Nouman Zia, Heidi Tuorila, Ajwaad Quashef, Joonas Hilska, Markus Peil, Mircea Guina

Proceedings Volume PC12889, PC128890X (2024) https://doi.org/10.1117/12.2692902

KEYWORDS: Tunable lasers, Laser applications, Biosensing, Spectroscopy, Quantum wells, Photonic integrated circuits, Light sources, Industrial applications, Gallium antimonide, Waveguides

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Proceedings Article | 13 March 2024 Presentation

µ-Transfer printing of GaSb-based gain elements for integrated external cavity lasers at 2 µm range

Heidi Tuorila, Jukka Viheriälä, Yeasir Arafat, Eero Koivusalo, Joonas Hilska, Fatih Atar, Fatima Gunning, Brian Corbett, Mircea Guina

Proceedings Volume PC12891, PC1289106 (2024) https://doi.org/10.1117/12.3002486

KEYWORDS: Silicon, Printing, Gallium antimonide, Semiconductor lasers, Semiconducting wafers, Telecommunications, Photoresist materials, Photonics, Laser frequency, Gallium arsenide

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Proceedings Article | 13 March 2024 Presentation

Bidirectional 1310 nm MEMS VCSEL

Masoud Payandeh, Hitesh Kumar Sahoo, Marika Janka, Jukka Viheriälä, Mircea Guina, Elizaveta Semenova, kresten Yvind, Esteban Andres Proano Grijalva

Proceedings Volume PC12904, PC1290409 (2024) https://doi.org/10.1117/12.3002368

KEYWORDS: Vertical cavity surface emitting lasers, Microelectromechanical systems, Semiconductors, Mirrors, Semiconducting wafers, Optical coherence tomography, Group III-V semiconductors, Semiconductor lasers, Optical resonators, Optical gratings

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Proceedings Article | 12 March 2024 Presentation

Cryogenic optical interfacing for scalable quantum computing: analysis of VCSEL operation and thermal profiles as an optical Link

Behzad Namvar, Jukka Viheriälä, Topi Uusitalo, Heikki Virtanen, Patrik Rajala, Sanna Ranta, Teemu Hakkarainen, Antti Tukiainen, Guilhem Almuneau, Mircea Guina

Proceedings Volume PC12880, PC1288006 (2024) https://doi.org/10.1117/12.3001360

KEYWORDS: Thermography, Cryogenics, Vertical cavity surface emitting lasers, Quantum computing, Quantum operations, Quantum communications, Process control, Quantum systems, Quantum processors, Quantum control

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Proceedings Article | 17 March 2023 Presentation

Hybrid GaSb/Si3N4 widely tunable Vernier laser emitting around 2.55 µm

Samu-Pekka Ojanen, Jukka Viheriälä, Nouman Zia, Eero Koivusalo, Joonas Hilska, Heidi Tuorila, Mircea Guina

Proceedings Volume PC12424, PC124240C (2023) https://doi.org/10.1117/12.2649922

KEYWORDS: Tunable lasers, Reflectivity, Semiconductors, Semiconductor lasers, Resonators, Laser resonators, Amplifiers, Wavelength tuning, Sensors, Mirrors

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Proceedings Article | 17 March 2023 Presentation

Characteristics of transfer printable GaSb laser diodes and gain devices for 2 to 3 µm integrated photonics

Jukka Viheriälä, Heidi Tuorila, Helmer Piirilä, Eero Koivusalo, Joonas Hilska, Mircea Guina, Yeasir Arafat, Fatih Atar, Brian Corbett

Proceedings Volume PC12424, PC124240D (2023) https://doi.org/10.1117/12.2645147

KEYWORDS: Gallium antimonide, Integrated photonics, Semiconductor lasers, Photonic integrated circuits, Waveguides, Urea, Silicon, Semiconductor optical amplifiers, Reflectivity, Pollution control

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Proceedings Article | 5 March 2022 Presentation

Low loss InP traveling wave amplifiers with U-bend waveguide for hybrid integration on silicon photonics platform

Heidi Tuorila, Jukka Viheriälä, Jae-Wung Lee, Mikko Harjanne, Matteo Cherchi, Timo Aalto, Mircea Guina

Proceedings Volume PC12005, PC120050B (2022) https://doi.org/10.1117/12.2609606

KEYWORDS: Waveguides, Silicon photonics, Amplifiers, Silicon, Gallium arsenide, Semiconductor lasers, Inspection

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Proceedings Article | 5 March 2022 Presentation

Mid-IR silicon photonics DBR laser with hybrid integrated GaSb gain element for sensing applications

Jukka Viheriälä, Nouman Zia, Heidi Tuorila, Samu-Pekka Ojanen, Eero Koivusalo, Joonas Hilska, Mircea Guina

Proceedings Volume PC12006, PC1200606 (2022) https://doi.org/10.1117/12.2609472

KEYWORDS: Mid-IR, Silicon photonics, Gallium antimonide, Chemical elements, Waveguides, Laser applications, Silicon, Integrated photonics, Silica, Semiconductor lasers

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Proceedings Article | 4 March 2022 Paper

High peak power tapered RWG laser diodes for eye-safe LIDAR applications around 1.5 µm wavelength

Topi Uusitalo, Jukka Viheriälä, Heikki Virtanen, Santeri Hanhinen, Roosa Hytönen, Jari Lyytikäinen, Mircea Guina

Proceedings Volume 11983, 119830Q (2022) https://doi.org/10.1117/12.2608601

KEYWORDS: Semiconductor lasers, LIDAR, Pulsed laser operation, Measurement devices, Quantum wells, Optical testing, Collimation

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Proceedings Article | 5 March 2021 Presentation

aCryComm: attojoule cryogenic communication

Matteo Cherchi, Joonas Govenius, Juha Hassel, Visa Vesterinen, Antti Kemppinen, Kirsi Tappura, Jaani Nissilä, Mark Bieler, Stephan Steinhauer, Val Zwiller, Stefan Köpfli, Maurizio Burla, Jürg Leuthold, Teemu Hakkarainen, Jukka Viheriälä, Mircea Guina, Mario Castaneda, Andreas Fognini, Eva De Leo, Claudia Hössbacher

Proceedings Volume 11692, 116920V (2021) https://doi.org/10.1117/12.2578250

KEYWORDS: Cryogenics, Superconductors, Signal processing, Quantum efficiency, Quantum computing, Interfaces, Data processing, Computing systems, Thermography

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Proceedings Article | 5 March 2021 Presentation

Widely tunable hybrid lasers at 2.6 µm wavelength based on micron-scale silicon-on-insulator waveguide technology and GaSb gain chips

Jukka Viheriälä, Samu-Pekka Ojanen, Eero Koivusalo, Nouman Zia, Mikko Harjanne, Matteo Cherchi, Timo Aalto, Mircea Guina

Proceedings Volume 11689, 116890U (2021) https://doi.org/10.1117/12.2576493

KEYWORDS: Waveguides, Tunable lasers, Silicon, Laser applications, Semiconductor lasers, Hybrid silicon lasers, Gallium antimonide, Reflectors, Mid-IR, Laser development

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Proceedings Article | 9 March 2020 Presentation

Progress in high-power broadband GaSb-based superluminescent diodes emitting at 2-3 um (Conference Presentation)

Nouman Zia, Jukka Viheriala, Eero Koivusalo, Antti Aho, Mircea Guina

Proceedings Volume 11302, 1130210 (2020) https://doi.org/10.1117/12.2544007

KEYWORDS: Superluminescent diodes, Laser sources, High power lasers, Waveguides, Measurement devices, Quantum wells, Etching, Chemical elements, Continuous wave operation, Pulsed laser operation

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Proceedings Article | 9 March 2020 Presentation

High peak power laser diodes at 1.5 um with integrated wavelength locking element (Conference Presentation)

Antti Aho, Jukka Viheriälä, Heikki Virtanen, Topi Uusitalo, Mervi Koskinen, Jarno Reuna, Mircea Guina

Proceedings Volume 11262, 112620E (2020) https://doi.org/10.1117/12.2542095

KEYWORDS: Semiconductor lasers, Quantum wells, Cladding, LIDAR, Optical design, Distributed Bragg reflectors, Fabry–Perot interferometers, Semiconducting wafers, Temperature metrology, Receivers

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Proceedings Article | 4 March 2019 Presentation + Paper

1.3 µm U-bend traveling wave SOA devices for high efficiency coupling to silicon photonics

Jukka Viheriälä, Heidi Tuorila, Nouman Zia, Matteo Cherchi, Timo Aalto, Mircea Guina

Proceedings Volume 10923, 109230E (2019) https://doi.org/10.1117/12.2505935

KEYWORDS: Waveguides, Silicon, Silicon photonics, Photonic integrated circuits, Semiconductor optical amplifiers, Signal attenuation, Scanning electron microscopy, Reflectivity, Semiconductor lasers, Yield improvement

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Proceedings Article | 23 May 2018 Presentation

High power GaSb superluminescent diodes with broadband emission around 2.55 µm (Conference Presentation)

Nouman Zia, Jukka Viheriala, Eero Koivusalo, Antti Aho, Soile Suomalainen, Mircea Guina

Proceedings Volume 10682, 1068215 (2018) https://doi.org/10.1117/12.2314876

KEYWORDS: Superluminescent diodes, Gallium antimonide, Light sources, Waveguides, Gases, NOx, Absorption, Quantum wells, Etching, Modulation

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Most of the environmental gases like H2S, C2H2, CH4, CO(2), N2O and H2O have strong absorption lines within 2-3 µm wavelength range. Detection of these gases requires a spectrally broad, compact, efficient, cost-effective, and high output power light source. Such choice of parameters can be offered by high brightness and broadband superluminescent diodes (SLD). Here we report the development of GaSb-based high power broadband superluminescent diodes (SLDs) emitting around 2.55 μm. The active region consists of two GaInAsSb/GaSb quantum wells. To enable high gain and high output power we adopted a long ridge waveguide (RWG) geometry, i.e. 2.5 mm. The width (5µm) and etching depth (1800 nm) of waveguide was chosen to operate device in single transverse mode. Lasing inside the cavity was suppressed by tilting the waveguide 8° with respect to cavity facets. Recently developed cavity suppression element [1] was employed to further suppress the spectral modulations and smoothen out the spectrum. For operation at long wavelengths, we employed a pulsed driving scheme with sub-µs pulse injection to address temperature dependent non-radiative Auger recombination. Devices have demonstrated an average output power of more than 3 mW and peak power over 15 mW at room temperature (RT). The maximum full-width at half-maximum (FWHM) of spectrum was ~124 nm, corresponding to 1200 mA drive current. This is the highest power reported to date for 2.55 µm SLDs. For comparison, SLD at 1.90µm emitted a continuous wave (CW) output power up to 60 mW and FWHM of ~ 60 nm [1]. Integration of this high brightness, broadband light sources with SOI-waveguides enables realization of a compact multiple gas sensor in this wavelength range [2]. [1] N. Zia, J. Viheriälä, R. Koskinen, A. Aho, S. Suomalainen, and M. Guina, “High power (60 mW) GaSb-based 1.9 μm superluminescent diode with cavity suppression element,” Appl. Phys. Lett., vol. 109, no. 23, p. 231102, 2016. [2] P. Karioja, T. Alajoki et al, “Multi-wavelength mid-IR light source for gas sensing”, Proc. SPIE 10110, 2017.

Proceedings Article | 14 May 2018 Presentation + Paper

Integrated multi-wavelength mid-IR light source for gas sensing

Pentti Karioja, Teemu Alajoki, Matteo Cherchi, Jyrki Ollila, Mikko Harjanne, Noora Heinilehto, Soile Suomalainen, Nouman Zia, Heidi Tuorila, Jukka Viheriälä, Mircea Guina, Ryszard Buczyński, Rafał Kasztelanic, Tomi Salo, Sami Virtanen, Paweł Kluczyński, Lars Borgen, Marcin Ratajczyk, Przemyslaw Kalinowski

Proceedings Volume 10657, 106570A (2018) https://doi.org/10.1117/12.2305712

KEYWORDS: Mid-IR, Light sources, Photonic integrated circuits, Gas sensors, Glasses, Optical filters, Silicon, Absorption, Sensors, Modulation

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Proceedings Article | 14 March 2018 Presentation

Quantum-well laser diodes operating at 1.28um monolithically integrated on Ge substrate (Conference Presentation)

Jukka Viheriälä, Antti Aho, Riku Isoaho, Arto Aho, Antti Tukiainen, Mircea Guina

Proceedings Volume 10537, 105370U (2018) https://doi.org/10.1117/12.2292738

KEYWORDS: Silicon, Semiconductor lasers, Germanium, Quantum wells, Modulation, Photonic integrated circuits, Hybrid silicon lasers, Quantum dots, Molecular beam epitaxy, Transparency

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Proceedings Article | 24 February 2017 Presentation + Paper

1180 nm GaInNAs quantum well based high power DBR laser diodes

Jukka Viheriälä, Antti Aho, Heikki Virtanen, Mervi Koskinen, Michael Dumitrescu, Mircea Guina

Proceedings Volume 10086, 100860K (2017) https://doi.org/10.1117/12.2251317

KEYWORDS: Semiconductor lasers, Quantum wells, High power lasers, Continuous wave operation, Distributed Bragg reflectors, Laser development, Harmonic generation, Nanoimprint lithography, Etching, Annealing, Waveguides, Gallium arsenide, Semiconducting wafers, Temperature metrology

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Proceedings Article | 20 February 2017 Presentation + Paper

Multi-wavelength mid-IR light source for gas sensing

Pentti Karioja, Teemu Alajoki, Matteo Cherchi, Jyrki Ollila, Mikko Harjanne, Noora Heinilehto, Soile Suomalainen, Jukka Viheriälä, Nouman Zia, Mircea Guina, Ryszard Buczyński, Rafał Kasztelanic, Ireneusz Kujawa, Tomi Salo, Sami Virtanen, Paweł Kluczyński, Håkon Sagberg, Marcin Ratajczyk, Przemyslaw Kalinowski

Proceedings Volume 10110, 101100P (2017) https://doi.org/10.1117/12.2249126

KEYWORDS: Mid-IR, Light sources, Photonic integrated circuits, Packaging, Gas sensors, Infrared technology, Glasses, Sensors, Photonic devices, Integrated optics, Optical filters, Silicon, Waveguides, Absorption

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Proceedings Article | 16 March 2016 Paper

Fabrication and characterization of broadband superluminescent diodes for 2 µm wavelength

Nouman Zia, Jukka Viheriälä, Riku Koskinen, Mervi Koskinen, Soile Suomalainen, Mircea Guina

Proceedings Volume 9768, 97680Q (2016) https://doi.org/10.1117/12.2209720

KEYWORDS: Light emitting diodes, Environmental monitoring, Waveguides, Superluminescent diodes, Semiconductor lasers, Optoelectronics, Spectroscopy, Chemical weapons, Pollution control, Diodes, Gallium antimonide, Continuous wave operation, Reflectivity, Absorption, Antireflective coatings, Quantum wells, Cladding

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Proceedings Article | 7 March 2016 Paper

Difference frequency modulation of multi-section dual-mode lasers with nanoscale surface gratings

Topi Uusitalo, Heikki Virtanen, Jukka Viheriälä, Joel Salmi, Antti Aho, Mihail Dumitrescu

Proceedings Volume 9767, 97670S (2016) https://doi.org/10.1117/12.2213888

KEYWORDS: Modulation, Difference frequency generation, Signal detection, Oscilloscopes, Semiconductor lasers, Photodiodes, Fourier transforms, Signal generators

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Proceedings Article | 4 March 2016 Paper

High-power 1550 nm tapered DBR lasers fabricated using soft UV-nano-imprint lithography

Jukka Viheriälä, Antti Aho, Jaakko Mäkelä, Joel Salmi, Heikki Virtanen, Tomi Leinonen, Mihail Dumitrescu, Mircea Guina

Proceedings Volume 9733, 97330Q (2016) https://doi.org/10.1117/12.2207423

KEYWORDS: Semiconductor lasers, Lithography, Chemical weapons, Waveguides, High power lasers, Nanoimprint lithography, LIDAR, Quantum wells, Optical lithography, Metals, Etching, Semiconducting wafers, Continuous wave operation, Optical design, Cladding

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Proceedings Article | 7 March 2014 Paper

High gain 1.3-μm GaInNAs SOA with fast-gain dynamics and enhanced temperature stability

D. Fitsios, G. Giannoulis, N. Iliadis, V.-M. Korpijärvi, J. Viheriälä, A. Laakso, S. Dris, M. Spyropoulou, H. Avramopoulos, G. Kanellos, N. Pleros, M. Guina

Proceedings Volume 8982, 898208 (2014) https://doi.org/10.1117/12.2037904

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Proceedings Article | 14 March 2013 Paper

Extending the direct laser modulation bandwidth by exploiting the photon-photon resonance: modeling, simulations and experiments

M. Dumitrescu, A. Laakso, J. Viheriala, M. Kamp, P. Bardella, G. Eisenstein

Proceedings Volume 8619, 86190A (2013) https://doi.org/10.1117/12.2004976

KEYWORDS: Modulation, Optical simulations, Phase shift keying, Modulation transfer functions, Eye, Terahertz radiation, Optical design, Reflectivity, Laser applications, Shape analysis

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Proceedings Article | 11 May 2012 Paper

Laterally-coupled high power GaSb distributed feedback lasers fabricated by nanoimprint lithography at 2 um wavelength

K. Haring, J. Paajaste, R. Koskinen, S. Suomalainen, J. Viheriälä, A. Laakso, T. Niemi, M. Guina

Proceedings Volume 8432, 84320T (2012) https://doi.org/10.1117/12.922811

KEYWORDS: Nanoimprint lithography, Gallium antimonide, Coating, Semiconductor lasers, Semiconductors, Etching, Waveguides, Nanolithography, Cladding, Quantum wells

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Proceedings Article | 22 March 2011 Paper

2 μm InGaSb/GaSb laterally coupled distributed feedback laser fabricated by nanoimprint lithography

K. Haring, J. Viheriälä, M.-R. Viljanen, J. Paajaste, R. Koskinen, S. Suomalainen, A. Laakso, K. Leinonen, T. Niemi, M. Guina

Proceedings Volume 7822, 782208 (2011) https://doi.org/10.1117/12.890260

KEYWORDS: Etching, Nanoimprint lithography, Cladding, Gallium antimonide, Laser processing, Semiconductors, Laser development, Laser damage threshold, Nanolithography, Plasma etching

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Proceedings Article | 17 February 2011 Paper

Development of high-speed directly modulated DFB and DBR lasers with surface gratings

M. Dumitrescu, J. Telkkälä, J. Karinen, J. Viheriälä, A. Laakso, S. Afzal, J.-P. Reithmaier, M. Kamp, P. Melanen, P. Uusimaa, P. Bardella, M. Vallone, I. Montrosset, O. Parillaud, M. Krakowski, D. Gready, G. Eisenstein, G. Sek

Proceedings Volume 7953, 79530D (2011) https://doi.org/10.1117/12.875674

KEYWORDS: Modulation, Refractive index, Scanning electron microscopy, Etching, Distributed Bragg reflectors, Laser development, Phase shift keying, Resistance, Waveguides, Cladding

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Proceedings Article | 17 February 2011 Paper

Narrow-linewidth distributed feedback lasers with laterally coupled ridge-waveguide surface gratings fabricated using nanoimprint lithography

M. Dumitrescu, J. Telkkälä, J. Karinen, J. Viheriälä, A. Laakso, K. Haring, M.-R. Viljanen, J. Paajaste, R. Koskinen, S. Suomalainen, J. Lyytikäinen, T. Leinonen, M. Pessa

Proceedings Volume 7953, 79530B (2011) https://doi.org/10.1117/12.875317

KEYWORDS: Laser development, Refractive index, Mirrors, Etching, Nanoimprint lithography, Laser damage threshold, Laser applications, LIDAR, Reflectivity, Fabrication

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Proceedings Article | 28 April 2010 Paper

40-GHz GaInNAs-based passively mode-locked laser diode

K. Haring, J. Thoma, T. Ochalski, S. Hegarty, J. Puustinen, J. Viheriälä, G. Huyet, M. Guina

Proceedings Volume 7720, 772017 (2010) https://doi.org/10.1117/12.854473

KEYWORDS: Gallium arsenide, Quantum wells, Mode locking, Semiconductor lasers, Picosecond phenomena, Silicon, Waveguides, Cladding, Luminescence, Etching

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Proceedings Article | 28 April 2010 Paper

2.34-µm electrically pumped VECSEL with buried tunnel junction

Antti Härkönen, Alexander Bachmann, Shamsul Arafin, Kimmo Haring, Jukka Viheriälä, Mircea Guina, Markus-Christian Amann

Proceedings Volume 7720, 772015 (2010) https://doi.org/10.1117/12.854467

KEYWORDS: Mirrors, Semiconductor lasers, Gallium antimonide, Vertical cavity surface emitting lasers, Mid-IR, Environmental monitoring, Laser applications, Reflectivity, Gases, Molecular beam epitaxy

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SPIE Journal Paper | 1 July 2009

Soft stamp ultraviolet-nanoimprint lithography for fabrication of laser diodes

Jukka Viheriala, Milla-Riina Viljanen, Juha Kontio, Tomi Leinonen, Juha Tommila, Mihail Dumitrescu, Tapio Niemi, Markus Pessa

JM3, Vol. 8, Issue 03, 033004, (July 2009) https://doi.org/10.1117/12.10.1117/1.3158307

KEYWORDS: Semiconducting wafers, Nanoimprint lithography, Waveguides, Etching, Semiconductor lasers, Lithography, Particles, Photomasks, Nanostructures, Electron beam lithography

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Proceedings Article | 18 March 2009 Paper

Soft stamp UV-nanoimprint lithography for fabrication of laser diodes

Jukka Viheriälä, Milla-Riina Viljanen, Juha Kontio, Tomi Leinonen, Juha Tommila, Michail Dumitrescu, Tapio Niemi, Markus Pessa

Proceedings Volume 7271, 72711O (2009) https://doi.org/10.1117/12.814122

KEYWORDS: Semiconducting wafers, Nanoimprint lithography, Waveguides, Etching, Semiconductor lasers, Particles, Nanostructures, Electron beam lithography, Photomasks, Lithography

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Proceedings Article | 26 August 2008 Paper

Role of local fields and defects in the nonlinear response of metal nanostructures

Martti Kauranen, Hannu Husu, Sami Kujala, Brian Canfield, Janne Laukkanen, Benfeng Bai, Markku Kuittinen, Jari Turunen, Juha Kontio, Jukka Viheriälä, Tapio Niemi, Eric Chandler, Jeff Squier

Proceedings Volume 7032, 70321J (2008) https://doi.org/10.1117/12.794220

KEYWORDS: Second-harmonic generation, Polarization, Metals, Nonlinear response, Particles, Nanostructures, Gold, Mirrors, Dielectric polarization, Plasmons

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Proceedings Article | 8 May 2008 Paper

Fabrication and characterization of GaInNAs/GaAs semiconductor optical amplifiers

J. Pozo, N. Vogiatzis, O. Ansell, P. Heard, J. Rorison, P. Tuomisto, J. Konttinen, M. Saarinen, C. Peng, J. Viheriälä, T. Leinonen, M. Pessa

Proceedings Volume 6997, 69970C (2008) https://doi.org/10.1117/12.781283

KEYWORDS: Etching, Ion beams, Semiconductor optical amplifiers, Photonic integrated circuits, Coarse wavelength division multiplexing, Quantum wells, Semiconductor lasers, Temperature metrology, Tunable lasers, Iodine

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Proceedings Article | 14 April 2006 Paper

Improvements in GaInNAs/GaAs quantum-well lasers using focused ion beam post-processing

J. Pozo, J. Hu, J. Rorison, M. Saarinen, J. Konttinen, J. Viheriälä, P. Leinonen, T. Jouhti, M. Pessa

Proceedings Volume 6184, 61840B (2006) https://doi.org/10.1117/12.663325

KEYWORDS: Modulation, Ion beams, Waveguides, Temperature metrology, Quantum wells, Semiconductor lasers, Optical design, Laser processing, Metals, Waveguide lasers

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Showing 5 of 35 publications

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