Mr. Julius Chih-Li Chen Profile

Julius Chih-Li Chen

at Nanya Technology Corp

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Publications (2)

Proceedings Article | 7 March 2008 Paper

Highly reliable detection and correction of pinched areas for high transmission phase shift mask

Chih Li Chen, Chun-Cheng Liao, Pin-Jan Chou, Chiang Lin Shih, Steven Shih

Proceedings Volume 6924, 692437 (2008) https://doi.org/10.1117/12.772499

KEYWORDS: Chromium, Photomasks, Optical lithography, Phase shifts, Data modeling, Resolution enhancement technologies, Optical proximity correction, Nanoimprint lithography, Solids, Manufacturing

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Proceedings Article | 27 March 2007 Paper

Verification of high-transmittance PSM with polarization at 193-nm high-NA system

Chui Fu Chiu, Chih Li Chen, Jenn Wei Lee, Wen Bin Wu, Chiang Lin Shih, Feng Yi Chen, Jeng Ping Lin

Proceedings Volume 6520, 65202E (2007) https://doi.org/10.1117/12.711893

KEYWORDS: Line edge roughness, Photomasks, Polarization, Nanoimprint lithography, Resolution enhancement technologies, Electroluminescence, Lithographic illumination, Phase shifts, Transmittance, Optical lithography

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