Mr. Jun Irisawa Profile

Jun Irisawa

Senior Researcher at AGC Inc

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Publications (3)

Proceedings Article | 12 May 2005 Paper

The modeling of immersion liquid by using quantum chemical calculation

Jun Irisawa, Takashi Okazoe, Takeshi Eriguchi, Osamu Yokokoji

Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.598703

KEYWORDS: Refractive index, Absorbance, Absorption, Liquids, Fluorine, Silicon, Germanium, Chemical species, Metals, Electrons

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Proceedings Article | 14 May 2004 Paper

Fluoropolymers for 157-nm single-layer resists developed using a new etching rate estimation model (KI-Model)

Yasuhide Kawaguchi, Takashi Sasaki, Jun Irisawa, Osamu Yokokoji, Shigeo Irie, Akihiko Otoguro, Toshiro Itani, Kiyoshi Fujii

Proceedings Volume 5376, (2004) https://doi.org/10.1117/12.533907

KEYWORDS: Polymers, Dry etching, Resistance, Etching, Chemical species, Transparency, Fluorine, Plasma etching, Lithography, Absorption

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Proceedings Article | 12 June 2003 Paper

Dry-etching resistance of fluoropolymers for 157-nm single-layer resists

Yasuhide Kawaguchi, Jun Irisawa, Shun-ichi Kodama, Shinji Okada, Yoko Takebe, Isamu Kaneko, Osamu Yokokoji, Seiichi Ishikawa, Shigeo Irie, Takuya Hagiwara, Toshiro Itani

Proceedings Volume 5039, (2003) https://doi.org/10.1117/12.483735

KEYWORDS: Polymers, Resistance, Etching, Chemical species, Fluorine, Transparency, Absorption, Lithography, Semiconducting wafers, Gases

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