Prof. Kenneth C. Cadien Profile

Prof. Kenneth C. Cadien

Intel Fellow at Univ of Alberta

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Publications (2)

Proceedings Article | 7 March 2014 Paper

Chemical mechanical polishing of boron-doped polycrystalline silicon

Hamidreza Pirayesh, Kenneth Cadien

Proceedings Volume 8973, 89730A (2014) https://doi.org/10.1117/12.2036822

KEYWORDS: Polishing, Surface finishing, Chemical mechanical planarization, Semiconducting wafers, Silicon, Photovoltaics, Boron, Chemistry, Abrasives, Solids

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Proceedings Article | 7 March 2005 Paper

Challenges for on-chip optical interconnects

Kenneth Cadien, Miriam Reshotko, Bruce Block, Audrey Bowen, David Kencke, Paul Davids

Proceedings Volume 5730, (2005) https://doi.org/10.1117/12.591163

KEYWORDS: Waveguides, Sensors, Silicon, Modulators, Optical interconnects, Photodetectors, Aluminum, Electrodes, Wavelength division multiplexing, Copper

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