Mr. Maarten M. Berkens Profile

Maarten M. Berkens

at Applied Materials Europe BV

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Proceedings Article | 22 February 2021 Presentation + Paper

Analysis of row to row routing in double height standard-cells

M. Berkens, S. Klaver

Proceedings Volume 11614, 1161410 (2021) https://doi.org/10.1117/12.2587213

KEYWORDS: Standards development, Materials processing, Complex systems, Silicon, Logic, Diffusion

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For advanced technology nodes the design of Standard Cell Libraries is becoming increasingly challenging. This is because with shrinking cell heightsthe available routing resources in the cells are becoming a major lim iting f actor, along with the rising complexity of design rules and technology options. The challenge of designing goodcells holds for both production libraries, where many cells need to be created, as well as for DTCO experiments, where many variations of a smaller library needto be made. Both types of libraries require highly optimized cells, either to have high quality design, or to have accurate PPA assessment during DTCO. Additionally, DTCO no longer meets the needs of today’s technological cha llenges and needs to be extended from Materials to Systems. At Applied Materials we include automatedStandard Cell Librarygeneration into ourMSCO^TM (Materials to Systems Co -Optimization^TM) f low. To demonstrate the power of automated Standard Cell Library generation, this paperfocuses on four experiments to a ssess the impact of advancedprocess and design rules and the choice of standard cell architectures;in particular double height cells. The experiments include different technology and architectural choices,such asthe number of tracks, poly silicon and diffusion for routing in between the rows in the cells. The results are compared in terms of theirmanufacturability and size. Ongoing work includes performance and power analysis on representative designs.

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