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Marek Mach
at Institute of Plasma Physics of the CAS vvi
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Publications (1)
Proceedings Article | 21 August 2020 Poster + Paper
Surface form characterization of plane-parallel elements using frequency-tuned phase-shifting interferometry
Proceedings Volume 11490, 1149010 (2020) https://doi.org/10.1117/12.2568732
KEYWORDS: Reflection, Phase shifts, Interferometers, Interferometry, Surface finishing, Fizeau interferometers, Phase interferometry, Diodes, Refractive index
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