Mr. Martin Burkhardt Profile

Martin Burkhardt

at JENOPTIK Optical Systems GmbH

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 12 September 2021 Presentation + Paper

Pallabi Paul, Vivek Beladiya, David Kästner, Ulrike Schulz, Martin Burkhardt, Adriana Viorica Szeghalmi

Proceedings Volume 11872, 118720E (2021) https://doi.org/10.1117/12.2595915

KEYWORDS: Antireflective coatings, Coating, Reflectivity, Domes, Atomic layer deposition, Plasma, Optics manufacturing, Thin films, Functional oxides

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Keywords/Phrases