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Dr. Michelle Xu
Engineer at Intel Corp
SPIE Involvement:
Author | Leadership Workshop Facilitator
Publications (1)
Proceedings Article | 12 February 2011 Paper
Silicon-on-insulator nanopillar-array optical sensor
Tao Xu, Michelle Xu, Ning Zhu, Priyadarshini Kumari, Lech Wosinski, Stewart Aitchison, Harry Ruda
Proceedings Volume 7908, 79080O (2011) https://doi.org/10.1117/12.874099
KEYWORDS: Optical microcavities, Refractive index, Coating, Silicon, Sensors, Optical sensors, Finite-difference time-domain method, Silica, Semiconducting wafers, Waveguides
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