Dr. Mirwais Aktary
CEO at Applied NanoTools Inc
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 3 October 2023 Presentation + Paper
Proceedings Volume 12694, 126940C (2023) https://doi.org/10.1117/12.2677780
KEYWORDS: Zone plates, Ruthenium, Chromium, Scanning transmission electron microscopy, Etching, Silicon nitride, Fabrication, Silicon carbide, EUV optics, Extreme ultraviolet

Proceedings Article | 17 March 2023 Presentation + Paper
Proceedings Volume 12424, 1242404 (2023) https://doi.org/10.1117/12.2647576
KEYWORDS: Silicon nitride, Photonic integrated circuits, Fabrication, Prototyping, Electron beam lithography, Silicon, Waveguides

Proceedings Article | 9 September 2019 Presentation
Robert Peters, Christian Fella, Dominik Müller, Mansi Shukla, Remko van den Hurk, Mirwais Aktary
Proceedings Volume 11112, 111120P (2019) https://doi.org/10.1117/12.2530590
KEYWORDS: Zone plates, X-ray optics, Electron beam lithography, Hard x-rays, X-ray imaging, Lithography, X-ray diffraction, X-rays, Optical alignment, Metals

Proceedings Article | 19 September 2017 Presentation
Jan Geilhufe, Adam F. Leontowich, Russ Berg, Chris Regier, Darwin Taylor, Jian Wang, John Swirsky, Chithra Karunakaran, Robert Peters, Mirwais Aktary, Adam Hitchcock, Stephen Urquhart
Proceedings Volume 10389, 103890P (2017) https://doi.org/10.1117/12.2275779
KEYWORDS: X-rays, Microscopes, Light sources, X-ray imaging, Tomography, Absorption spectroscopy, Liquids, Cryogenics, Temperature metrology, Nanoprobes

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