Neilanjan Dutta
Research Assistant at Univ of Delaware
SPIE Involvement:
Author
Publications (3)

SPIE Journal Paper | 1 April 2010
JM3, Vol. 9, Issue 02, 023003, (April 2010) https://doi.org/10.1117/12.10.1117/1.3373515
KEYWORDS: Photonic crystals, Polymers, Photomasks, Photoresist processing, Ultraviolet radiation, Calibration, Deep ultraviolet, Semiconductor manufacturing, Lithography, Image processing

Proceedings Article | 24 February 2009 Paper
Proceedings Volume 7205, 72050K (2009) https://doi.org/10.1117/12.809670
KEYWORDS: Photoresist processing, Image processing, Lithography, Calibration, Photonic crystals, Ultraviolet radiation, Photomasks, Scanning electron microscopy, Polymers, Fabrication

Proceedings Article | 24 February 2009 Paper
Proceedings Volume 7204, 720404 (2009) https://doi.org/10.1117/12.809715
KEYWORDS: Metals, Etching, Semiconductor lasers, Electrodes, Resonators, Photomasks, Silica, Waveguides, Semiconductors, Polymers

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