Dr. Piotr Marczuk Profile

Dr. Piotr Marczuk

Project Manager at Berliner Glas KGaA Herbert Kubatz GmbH & Co

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 18 October 2004 Paper

Source collection optics for EUV lithography

Piotr Marczuk, Wilhelm Egle

Proceedings Volume 5533, (2004) https://doi.org/10.1117/12.549409

KEYWORDS: Mirrors, Extreme ultraviolet, Reflectivity, EUV optics, Optics manufacturing, Light, Extreme ultraviolet lithography, Palladium, Optical fabrication, Metals

Read Abstract +

Proceedings Article | 13 January 2004 Paper

EUV collectors: design, development, fabrication, and testing

Wilhelm Egle, Wolfgang Hafner, Axel Matthes, Eral Erzin, Bernhard Gaenswein, Herbert Schwarz, Piotr Marczuk, Martin Antoni, Wolfgang Singer, Frank Melzer, Joachim Hainz

Proceedings Volume 5193, (2004) https://doi.org/10.1117/12.507736

KEYWORDS: Mirrors, Extreme ultraviolet, EUV optics, Palladium, Reflectivity, Nickel, Optical fabrication, Reflectors, Photons, Optical testing

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years