Rainer Merz
at Univ Stuttgart
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 21 August 2009 Paper
Rainer Merz, Jens Kistner, Markus Schubert, Jürgen Werner
Proceedings Volume 7409, 74090K (2009) https://doi.org/10.1117/12.826132
KEYWORDS: Solar cells, Optical lithography, Glasses, Thin films, Plasma enhanced chemical vapor deposition, Sputter deposition, Thin film solar cells, Manufacturing, Plasma, Metals

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