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Rieko Suenaga
at Rigaku Corp
SPIE Involvement:
Author
Area of Expertise:
X-ray , CD-SAXS , Metrology
Publications (2)
Proceedings Article | 27 April 2023 Poster + Paper
Determination of deep hole structure for advanced semiconductor devices analyzed by transmission x-ray scattering
Proceedings Volume 12496, 124962W (2023) https://doi.org/10.1117/12.2658129
KEYWORDS: Scattering, X-rays, Semiconducting wafers, Semiconductors, Etching, Critical dimension metrology, Process control, X-ray technology, Metrology
Proceedings Article | 27 April 2023 Poster + Paper
Precise 3D profile measurement of high aspect ratio device patterns by small-angle x-ray scattering
Proceedings Volume 12496, 124962A (2023) https://doi.org/10.1117/12.2657063
KEYWORDS: Tin, X-rays, Scattering, Transmission electron microscopy, Semiconducting wafers, 3D modeling, X-ray detectors, 3D metrology, Silicon, Film thickness
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