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Shuo-Wei Chen
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Publications (1)
Proceedings Article | 8 March 2016 Paper
Significant improvement of GaN crystal quality with ex-situ sputtered AlN nucleation layers
Shuo-Wei Chen, Young Yang, Wei-Chih Wen, Heng Li, Tien-Chang Lu
Proceedings Volume 9768, 97681D (2016) https://doi.org/10.1117/12.2211721
KEYWORDS: Aluminum nitride, Crystals, Transmission electron microscopy, Internal quantum efficiency, Quantum wells, Sapphire, Sputter deposition, Light emitting diodes, Gallium nitride, Electro optics, Raman spectroscopy, Epitaxy, X-rays, Statistical analysis
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