Dr. Simon Bonnani Profile

Dr. Simon Bonnani

at Heidelberg Instruments Nano AG

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Publications (1)

Proceedings Article | 10 April 2024 Presentation

Scaling up thermal scanning probe lithography with the NanoFrazor: avenues for parallelization and automation

Jana Chaaban, Fabian Könemann, Simon Bonnani, Kartik Buddha, Emine Cagin

Proceedings Volume PC12956, PC129560L (2024) https://doi.org/10.1117/12.3009852

KEYWORDS: Automation, Optical lithography, Scanning probe lithography, Lithography, Nanostructures, Overlay metrology, Fabrication, Waveguides, Silicon, Reliability

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