Dr. Sonali Chopra
at SandBox Semiconductor
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 25 March 2020 Paper
Proceedings Volume 11329, 113290Z (2020) https://doi.org/10.1117/12.2552156
KEYWORDS: Etching, System on a chip, Silicon, Calibration, Model-based design, Argon, Optimization (mathematics), Critical dimension metrology, Semiconductors, Plasma etching

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