Mr. SuYeun Baek Profile

SuYeun Baek

at ASML Korea

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 10 April 2024 Poster + Paper

Diffraction-based metrology for dose monitoring and control

Young Sung Kim, JongHyun Lee, SangHyun Lee, Kwangseok Maeng, JaeHyoung Kim, InSung Kim, SungWoon Uh, Eric Janda, Ajinkya Patil, SuYeun Baek, SeongYong Cho, James Lee

Proceedings Volume 12955, 129553E (2024) https://doi.org/10.1117/12.3010991

KEYWORDS: Semiconducting wafers, Metrology, Critical dimension metrology, Diffraction, Scanners, Dose control, Design, Wafer level optics, Optical sensing, Diffraction gratings

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years