Suthamathy Sathananthan
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 7 December 2013 Paper
Suthamathy Sathananthan, Scott Genin, J. Stewart Aitchison, D. Grant Allen
Proceedings Volume 8923, 892350 (2013) https://doi.org/10.1117/12.2033794
KEYWORDS: Polymethylmethacrylate, Natural surfaces, Semiconducting wafers, Photomasks, Optical lithography, Silicon, Electron beam lithography, Oxides, Tissue engineering, Lithography

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