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Vittorio Colicci
at MIT Kavli Institute for Astrophysics and Space Research
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Publications (1)
Proceedings Article | 10 April 2024 Presentation
Metrology challenges for fabrication of high aspect ratio, nano scale x-ray diffraction gratings
Proceedings Volume 12955, 129550Z (2024) https://doi.org/10.1117/12.3010409
KEYWORDS: Diffraction gratings, X-rays, Semiconducting wafers, X-ray diffraction, Metrology, Fabrication, Etching, Spectrometers, Spectral resolution, Reflection
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