Dr. Waiz Karim
Head of Disruptive Technologies at Carl Zeiss Vision
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 15 September 2016 Paper
Proceedings Volume 9926, 99260T (2016) https://doi.org/10.1117/12.2238805
KEYWORDS: Extreme ultraviolet, Lithography, Extreme ultraviolet lithography, Photoresist materials, Electron beam lithography, Diffraction gratings, Optical lithography, Diffraction, Silicon, Systems modeling

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