Deformable mirror is a very important reflective component in optical system, which can vary the focal length while
the surface deform. Nowadays several type of material were used as deformable mirror, such as liquid lens and MEMS
deformable mirror. MEMS deformable mirror have been developed in our group and shows the potential. However, the
problem of high actuation voltage is not easy to solve.
In this thesis, we proposed using low voltage applied material, which is called Ioic-Polymer Metal Composite (IPMC)
with the advantage of low applied voltage but high actuation performance. Arbitrary-shaped electrode IPMC was
successfully fabricated by simply covering a shadow mask during electroless plating. Maximum central displacement of
ellipsoid-shaped electrode IPMC can be achieved up to 350 μm under 2.5 volts applied. We believe this technique can be
used in optical system as a deformable mirror in the future.
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