In this paper, using effective-medium theory (EMT) and finite different time domain (FDTD), the dependence of
reflectivity to 1.06 μm incident light upon structural parameters of rectangular subwavelength surface-relief structure has
been discussed, the reliability of FDTD has been proved, and the validity of the two theories has been contrasted. The
influence of refractive index and filled factor to reflectivity has been analyzed detailedly. And the structural parameters
also have been discussed by diffraction orders in the energy field of reflective area with FDTD. The results shows that
the best filled factor is near 0.7, the structure periods should less than 0.6λ, and the structure thickness would be set to
λ/4neff. It can be used as the basis for design and fabrication of surface structural materials with proper antireflection
property.
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