Mr. Wenhao Pan Profile

Wenhao Pan

at ASML Shenzhen

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Publications (1)

Proceedings Article | 25 May 2022 Presentation + Paper

OPC accuracy improvement through deep-learning based etch model

Weina Shi, Liang Zhu, Yuqian Chen, Jiao Huang, Jinze Wang, Qian Xie, Bilun Zhang, Yunfei Xi, Wenhao Pan, Yuanxia Zheng, Yongfa Fan, Jin Cheng, Yu Zhao, Leiwu Zheng

Proceedings Volume 12056, 1205607 (2022) https://doi.org/10.1117/12.2613926

KEYWORDS: Etching, Process modeling, Data modeling, Performance modeling, Optical proximity correction, Semiconducting wafers, Scanning electron microscopy, Calibration, Model-based design, Metrology

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