Ms. Xiaohua Li Profile

Xiaohua Li

at Henan Polytechnic Univ

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Publications (2)

Proceedings Article | 15 February 2022 Paper

Projecting uniformity subwavelength pattern by plasmonic lithography with unidirectional surface plasmon coupler

Shuxia Zhang, Baoji Wang, Xiaolin Cai, Qin Wang, Weiyang Yu, Xiaohua Li, Erguang Jia, Yingying Zhu, Xuefeng Yang

Proceedings Volume 12166, 121660N (2022) https://doi.org/10.1117/12.2605592

KEYWORDS: Waveguides, Nanolithography, Surface plasmons, Lithography

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SPIE Journal Paper | 7 May 2019

Subwavelength interference nanolithography based on metallic–insulator–metallic waveguide with a trapezoid metallic nanoslit coupler

Shuxia Zhang, Xuefeng Yang, Weiyang Yu, Baoji Wang, Xiaolin Cai, Liwei Zhang, Xiaohua Li, Xingtao Jia, Jian Wang, Xiaoxia Zhao

JNP, Vol. 13, Issue 02, 026006, (May 2019) https://doi.org/10.1117/12.10.1117/1.JNP.13.026006

KEYWORDS: Waveguides, Nanolithography, Lithography, Aluminum, Photoresist materials, Wave propagation, Surface plasmon polaritons, Lithium, Metals, Optical lithography

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