Mr. Xiaoming Patrick Luo Profile

Xiaoming Patrick Luo

Senior Optical Engineer at Juheng Technology Co Ltd

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 2 August 2004 Paper

Micro optical probe sensor (MOPS) for dynamic in-plane displacement sensing

Anand Asundi, Xiaoming Luo

Proceedings Volume 5532, (2004) https://doi.org/10.1117/12.557504

KEYWORDS: Sensors, Actuators, Diffraction gratings, Laser beam diagnostics, Positron emission tomography, Spatial frequencies, Optical resolution, Objectives, Wave plates, Photodetectors

Read Abstract +

A novel Micro Optical Probe Sensor (MOPS) is proposed for dynamic in-plane displacement sensing of small objects subject to high frequency and small amplitude of in-plane vibration. A thin reflection grating with high spatial frequency is attached to or made directly on the object to be sensed. When the micro optical probe sensor (MOPS), which includes diode laser source, optical probe generation system and photodetector, scans the diffraction grating, a sinusoidal output is generated. Each cycle of this sinusoidal waveform corresponds to one pitch of the diffraction grating. By analyzing these output signals, the vibration amplitude and frequency can be determined. The approach is validated by experiments using an Optical Pickup Unit (OPU) as the MOPS probe detector and a piece of CD as the grating element. Experiments use electromagnetic actuator (EMA) and piezo-electric transducer (PET) to generate different vibration amplitude and frequency. The measurement resolution of 0.4 micron and the accuracy of 0.8 micron are achieved. The experiments have also shown the capability of measured vibration frequency greater than 21 kHz and vibration amplitude smaller than 1 micron.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years