Dr. Xing Liu Profile

Dr. Xing Liu

at Shanghai Institute of Optics

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Author

Publications (4)

SPIE Journal Paper | 17 March 2022

Motion performance measurement and optimization of motorized stages using tightly focused laser marking

Xing Liu, Guodong Chen, Jinlun Zheng, Xiaozhong Xu, Tianyu Gao, Tao Wei, Jingsong Wei

OE, Vol. 61, Issue 03, 034106, (March 2022) https://doi.org/10.1117/12.10.1117/1.OE.61.3.034106

KEYWORDS: Motion measurement, Laser marking, Thin films, Velocity measurements, Mirrors, Sensors, Optical engineering, Lithography, Thermal effects, Crystals

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SPIE Journal Paper | 14 March 2022

Alignment method for rotary stage axis and optical axis in the polar coordinate direct laser writing system

Jinlun Zheng, Guodong Chen, Lu Wang, Xiaohang Sheng, Xing Liu, Tianyu Gao, Xiaozhong Xu, Peijun Zhao, Jingsong Wei

OE, Vol. 61, Issue 03, 034104, (March 2022) https://doi.org/10.1117/12.10.1117/1.OE.61.3.034104

KEYWORDS: Optical alignment, Calibration, Imaging systems, Distortion, Cameras, Laser optics, Laser systems engineering, Optical engineering, Laser engraving, 3D modeling

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Proceedings Article | 1 November 2021 Paper

Defocusing detection based on asymmetric placement of dual-quadrant detector

Jinlun Zheng, Xing Liu, Guodong Chen, Zhengwei Wang, Lu Wang, Tianyu Gao, Zhichang Mo, Jingsong Wei

Proceedings Volume 12057, 120572E (2021) https://doi.org/10.1117/12.2605876

KEYWORDS: Sensors, Signal detection, Objectives, Error analysis, Monochromatic aberrations, Lithography, Ferroelectric materials, Optical imaging, Wave plates, Shape analysis

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Proceedings Article | 1 November 2021 Paper

Auto-focusing of ultra-clean sample based on projection view method

Xing Liu, Guodong Chen, Jinlun Zheng, Jingsong Wei

Proceedings Volume 12057, 1205738 (2021) https://doi.org/10.1117/12.2606335

KEYWORDS: Image analysis, Objectives, Image fusion, Error analysis, Image quality, Photoresist materials, Charge-coupled devices, Image processing, RGB color model, Optical imaging

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