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Dr. Yevgeny Lifshitz
at GlobalFoundries
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Publications (1)
Proceedings Article | 26 May 2022 Poster + Paper
Conducting a metrology measurement using M-FOUP system in fab environment
Yevgeny Lifshitz, Jeffrey Wood, David Novack, Jack Downey, Dinay Dash, Shiladitya Chakravorty, Michael Raga-Barone, Taher Kagalwala, Alfred Hajtman, John Byrnes, Csaba Nándor Bitvai, Anna Bölcskei-Molnár, Peter Basa
Proceedings Volume 12053, 1205328 (2022) https://doi.org/10.1117/12.2614337
KEYWORDS: Metrology, Semiconducting wafers, Wafer testing, Control systems, Time metrology, Reflectometry, Reflectance spectroscopy, Manufacturing, System integration, Environmental sensing
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