Yi Cheng
at ChangXin Memory Technologies Inc
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 21 November 2023 Poster + Paper
Proceedings Volume 12751, 1275119 (2023) https://doi.org/10.1117/12.2687170
KEYWORDS: Photoresist materials, Lithography, Semiconducting wafers, Advanced patterning, Semiconductors, Photoresist developing, Shrinkage, Power consumption, Line width roughness, Line edge roughness

Proceedings Article | 21 November 2023 Poster + Paper
Yilei Zeng, Yi Cheng, Mengyao Jin, Hunter Li
Proceedings Volume 12751, 127510Z (2023) https://doi.org/10.1117/12.2684046
KEYWORDS: Semiconducting wafers, Inspection, Transmittance, Algorithm development, Air contamination, Image processing, Detection and tracking algorithms, Defect detection, Visualization, Inspection equipment

Proceedings Article | 28 April 2023 Poster + Paper
Proceedings Volume 12494, 124941H (2023) https://doi.org/10.1117/12.2657250
KEYWORDS: Photoresist materials, Source mask optimization, Reticles, Etching, Light sources and illumination, Optical lithography, Lithography, Image enhancement, Phase shifts, Nanoimprint lithography, Deep ultraviolet

Proceedings Article | 1 December 2022 Poster + Paper
Proceedings Volume 12293, 122930X (2022) https://doi.org/10.1117/12.2641687
KEYWORDS: Photomasks, Semiconducting wafers, Lithography, Nanoimprint lithography, Phase shifts, Metrology, Scanning electron microscopy, Polarization, Lithographic illumination, Transmittance

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