Dr. Ying Yan
at Dalian Univ of Technology
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 30 August 2022 Paper
Proceedings Volume 12309, 123091E (2022) https://doi.org/10.1117/12.2645714
KEYWORDS: Copper, Polishing, Surface finishing, Ions, Corrosion, Surface roughness, Resistance, Metals, Diffusion, Electrochemical etching

Proceedings Article | 21 June 2019 Paper
Proceedings Volume 11056, 110562B (2019) https://doi.org/10.1117/12.2525241
KEYWORDS: Silicon, Semiconducting wafers, Error analysis, Objectives, Phase shifts, Interferometry, Atomic force microscopy, Analytical research, Interferometers, Modulation

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