Mr. Yu-Hsun Lee Profile

Yu-Hsun Lee

at National Taiwan Univ

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Publications (2)

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Proceedings Article | 15 February 2012 Paper

Generating high DOF light by using tapered hollow tube in a lithography system

Chun-Yen Chen, Yu-Hsun Lee, Chih-Jen Chien, Yuh-Yan Yu, Chih-Kung Lee

Proceedings Volume 8249, 824912 (2012) https://doi.org/10.1117/12.906722

KEYWORDS: Bessel beams, Lithography, Near field scanning optical microscopy, Finite-difference time-domain method, Microscopes, Near field optics, Semiconductor lasers, Gold, Silicon, Silica

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In this paper, we proposed a tapered hollow tube which can produce a near diffraction-limit spot and focus the incident light in far-field region. From previous researches, the sub-wavelength annular aperture (SAA) made on metallic film generates a Bessel beam in far-field region. Also, the traditional tapered fiber has been widely used in near-field scanning optical microscope (NSOM) to achieve super-resolution in near-field. Combining these two concepts, tapered hollow tube was shown to have great potential in creating a small sub-micron spot size and long depth of focus (DOF) emitted light beam. By using the commercially available capillary and fiber heat-pulling method, it was found that tube processed per design to be disclosed in this paper can achieve Bessel beam as well. It will be shown that the SAA-like structure was actually implemented by the geometry of the tube tip. From FDTD simulation and experiment, the emitted beam was identified to have more than 10 μm DOF and 250-300 nm focal spot excited by using the 408 nm laser source. These results not only can help us pursue lithography applied to create through silicon via (TSV) process in far-field region while maintaining near diffraction-limit spot size. The high throughput and side lobe became a serious problem when continuous incident light was used. To circumvent this problem, the incident light from was changed from continuous to pulse type and a suitable lithography experimental system designed by using three-axis displacement platform was developed. All results will be detailed in this paper.

Proceedings Article | 17 February 2010 Paper

The circular polarization interferometer based surface plasmon biosensor

C.-M. Jan, Y.-H. Lee, C.-K. Lee

Proceedings Volume 7577, 75770B (2010) https://doi.org/10.1117/12.842037

KEYWORDS: Polarization, Surface plasmons, Interferometry, Refractive index, Algorithm development, Interferometers, Mirrors, Prisms, Tolerancing, Thin films

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Circular polarization interferometry configuration was used to develop surface plasmon based instrument, which had two light beams with p- and s- polarization states individually within the common path. We used evanescent field to determine the concentration of the biological sample via varying incident angles enabled phase interrogation. The instrument named "OBMorph" includes a light source, an easy to use incident angle varying scheme based on a parabolic and a spherical mirrors, and prism coupled sample stages. To increase the metrology sensitivity, which depends on precisely control the angular resolution, a precision step-motor coupled with a parabolic mirror were used to control the incident angle accurately. By using fault tolerance algorithm, the imperfect adjustment of circular polarization interferometer was eliminated to obtain a perfect Lissajous curve needed for circular polarization interferometry. The instrument developed was shown to have resolution as high as 4.92×10^-6 RIU. The effect that refractive index of ITO thin film changes with respect to externally applied voltage was also adopted by coating an ITO thin film onto biochips so as to shift the surface plasmon resonance angle for larger phase interrogation ranges. We successfully measured CRP and anti-CRP specific interaction in 0.75 μg/ml ~ 400 μg/ml ranges. In addition, the concentrations of tuberculosis inhibitor - DHFR and compound Mg₂P₄O₇ that can interact with CYP450 were also quantified successfully. The OBMorph was shown to have potential applications in areas such as flat panel displays, optical coating, and drug delivery, to name a few.

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