Mr. Yujie Xu Profile

Yujie Xu

at Hitachi High-Tech Corp

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Author

Publications (2)

Proceedings Article | 22 February 2021 Poster + Presentation + Paper

Effects of lithography process conditions on unbiased line roughness by PSD analysis

Yuyang Bian, Lulu Lai, Song Gao, Dandan Hu, Xijun Guan, Biqiu Liu, Xiaobo Guo, Cong Zhang, Jun Huang, Yu Zhang, Yongyu Yuan, Yujie Xu

Proceedings Volume 11611, 116112I (2021) https://doi.org/10.1117/12.2583545

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Proceedings Article | 20 March 2020 Paper

The improvement of measurement accuracy of SADP pitch walking issue

Pei Liu, Cheng-Zhang Wu, Hung-Wen Chao, Wenzhan Zhou, Yu Zhang, Chan-Yuan Hu, Yujie Xu, Jhen-Cyuan Li, Yen-Chan Chiu, Chun-Han Liu, Ran-Fu Yang, Chi-Hung Wang

Proceedings Volume 11325, 113252Z (2020) https://doi.org/10.1117/12.2552057

KEYWORDS: Transmission electron microscopy, Calibration, Semiconducting wafers, Electron microscopes, Fin field effect transistors, Image filtering, Scanning electron microscopy, Etching, Image quality, Integrated circuits, Deep ultraviolet, 193nm lithography, Electro optical systems calibration, Precision measurement, Accuracy assessment

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