Mr. Tah-Te Shih Profile

Tah-Te Shih

at TSMC

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Publications (2)

Proceedings Article | 12 December 2009 Paper

Implementation of new recticle inspection technology for progressive mask defect detection strategy on memory fab

Andy Lan, Jenny Hsu, Todd T. Shih, Toroy Tien, Jackie Cheng, Mike Yeh, Ellison Chen, David Wu

Proceedings Volume 7520, 752026 (2009) https://doi.org/10.1117/12.837028

KEYWORDS: Inspection, Photomasks, Reticles, Air contamination, Semiconducting wafers, Defect detection, Optical proximity correction, SRAF, Image transmission, Sensors

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Proceedings Article | 12 December 2009 Paper

Overlay improvement by ASML HOWA 5th alignment strategy

Raf Wang, CY Chiang, Wilson Hsu, Richer Yang, Todd Shih, Jackie Chen, Jonathan Chiu, Wythe Lin

Proceedings Volume 7520, 752023 (2009) https://doi.org/10.1117/12.839816

KEYWORDS: Semiconducting wafers, Optical alignment, Distortion, Overlay metrology, Front end of line, Lithography, Scanners, Capacitance, Current controlled current source, Yield improvement

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