Articles

Electrothermal micromirror with dual-reflective surfaces for circumferential scanning endoscopic imaging

[+] Author Affiliations
Lei Wu, Huikai Xie

University of Florida, Department of Electrical and Computer Engineering, Gainesville, Florida 32611

J. Micro/Nanolith. MEMS MOEMS. 8(1), 013030 (February 19, 2009). doi:10.1117/1.3082186
History: Received July 15, 2008; Revised December 20, 2008; Accepted January 08, 2009; Published February 19, 2009
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We report the design, fabrication, and measurements of a dual-reflective, single-crystal silicon-based micromirror that can perform circumferential scanning for endoscopic optical coherence tomography (EOCT). Full 360-deg optical scan angle (OSA) can be achieved by using a dual-reflective mirror with ±45-deg (or 90-deg) mechanical scan angle (MSA), where each reflective mirror surface contributes a 180-deg optical scanning. A novel surface- and bulk-combined micromachining process based on silicon on insulator (SOI) wafers is developed for fabricating the dual-reflective micromirror. The mirror flatness is maintained by the single-crystal-silicon device layer of SOI wafers, and aluminum is coated on both sides for reflection. A fabricated device demonstrated about half circumferential scanning range at resonance of 425Hz. Other measured data include the radii of curvature, 129mm (front surface) and 132mm (back surface), and the reflectance, 86.3% (front surface) and 84.2% (back surface). This micromirror has the potential to realize full-circumferential-scanning EOCT imaging.

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© 2009 Society of Photo-Optical Instrumentation Engineers

Citation

Lei Wu and Huikai Xie
"Electrothermal micromirror with dual-reflective surfaces for circumferential scanning endoscopic imaging", J. Micro/Nanolith. MEMS MOEMS. 8(1), 013030 (February 19, 2009). ; http://dx.doi.org/10.1117/1.3082186


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