Special Section on Theory and Practice of MEMS/NEMS/MOEMS, RF MEMS, and BioMEMS

Design and fabrication of a novel single-chip MEMS capacitive microphone using slotted diaphragm

[+] Author Affiliations
Bahram Azizollah Ganji

Babol University of Technology, Department of Electrical Engineering, 484 Babol, Iran

Burhanuddin Yeop Majlis

Universiti Kebangsaan Malaysia, Institute of Microengineering and Nanoelectronics, Bangi, Selangor 43600, Malaysia

J. Micro/Nanolith. MEMS MOEMS. 8(2), 021112 (April 02, 2009). doi:10.1117/1.3091941
History: Received July 20, 2008; Revised November 05, 2008; Accepted November 17, 2008; Published April 02, 2009
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A novel single-chip microelectromechanical systems (MEMS) capacitive microphone with a slotted diaphragm for sound sensing is developed to minimize the microphone size and improve the sensitivity by decreasing the mechanical stiffness of the diaphragm. According to the results, a clamped microphone with a 2.43×2.43-mm2 diaphragm and a slotted one with a 1.5-×1.5-mm2 diaphragm have the same mechanical sensitivity, but the size of slotted microphone is at least 1.62 times smaller than clamped structure. The results also yield a sensitivity of 5.33×106pFPa for the clamped and 3.87×105pFPa for the slotted microphone with a 0.5×0.5-mm2 diaphragm. The sensitivity of the slotted diaphragm is increased 7.27 times. The calculated pull-in voltage of the clamped microphone is 214V, the measured pull-in voltage of the slotted one is 120V. The pull-in voltage of the slotted microphone is about 50% decreased.

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© 2009 Society of Photo-Optical Instrumentation Engineers

Citation

Bahram Azizollah Ganji and Burhanuddin Yeop Majlis
"Design and fabrication of a novel single-chip MEMS capacitive microphone using slotted diaphragm", J. Micro/Nanolith. MEMS MOEMS. 8(2), 021112 (April 02, 2009). ; http://dx.doi.org/10.1117/1.3091941


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