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In situ measurement of gas diffusion properties of polymeric seals used in MEMS packages by optical gas leak testing

[+] Author Affiliations
Changsoo Jang

University of Maryland, College Park, Maryland 20742

Arindam Goswami

University of Maryland, College Park, Maryland 20742

Bongtae Han

University of Maryland, College Park, Maryland 20742

Suk-Jin Ham

Samsung Electro-Mechanics, Suwon, South Korea

J. Micro/Nanolith. MEMS MOEMS. 8(4), 043025 (October 02, 2009). doi:10.1117/1.3227904
History: Received April 11, 2009; Revised July 21, 2009; Accepted August 05, 2009; Published October 02, 2009
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A novel inverse approach is proposed for in situ measurement of gas diffusion properties of polymeric seals used in microelectromechanical systems (MEMS) packages. The cavity pressure evolution of a polymer-sealed MEMS package subjected to a constant bombing pressure is documented as a function of time using classical interferometry, and the diffusion properties of the polymeric seal are subsequently determined from the measured pressure history. A comprehensive numerical procedure for the inverse analysis is established considering three diffusion regimes that characterize the leak behavior through a polymeric seal. The method is implemented to determine the helium diffusivity and solubility of a polymeric seal.

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© 2009 Society of Photo-Optical Instrumentation Engineers

Citation

Changsoo Jang ; Arindam Goswami ; Bongtae Han and Suk-Jin Ham
"In situ measurement of gas diffusion properties of polymeric seals used in MEMS packages by optical gas leak testing", J. Micro/Nanolith. MEMS MOEMS. 8(4), 043025 (October 02, 2009). ; http://dx.doi.org/10.1117/1.3227904


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