Regular Articles

Performance evaluation of perforated micro-cantilevers for MEMS applications

[+] Author Affiliations
Kenkere Balashanthamurthy Mruthyunjaya Swamy

Indian Institute of Technology, Department of Electrical Engineering, Kharagpur 721302, India

Banibrata Mukherjee

Indian Institute of Technology, Department of Electrical Engineering, Kharagpur 721302, India

Zishan Ali Syed Mohammed

Indian Institute of Technology, Department of Electrical Engineering, Kharagpur 721302, India

Suman Chakraborty

Indian Institute of Technology, Department of Mechanical Engineering, Kharagpur 721302, India

Siddhartha Sen

Indian Institute of Technology, Department of Electrical Engineering, Kharagpur 721302, India

J. Micro/Nanolith. MEMS MOEMS. 13(2), 023001 (Apr 09, 2014). doi:10.1117/1.JMM.13.2.023001
History: Received November 20, 2013; Revised January 30, 2014; Accepted March 11, 2014
Text Size: A A A

Abstract.  Miniaturized cantilevers are one of the elementary structures that are widely used in many micro-devices and systems. The dynamic performance of micro-cantilevers having process dictated through perforations is investigated. High-aspect ratio, long silicon cantilevers, intended for improved performance through lowered stiffness are designed with a series of through holes and simulated along with similar nonperforated/solid cantilevers for comparison. A few perforated structures are also fabricated using silicon-on-insulator-based multiproject MEMS processes from MEMSCAP Inc. (Durham, North Carolina) by reduced mask level and eliminating complex substrate trenching step. The dynamic behavior of these fabricated structures is experimentally studied for both in-plane and out-of-plane directions. It is shown that, due to the presence of perforations, stiffness in planar direction is lightly affected, whereas in out-of-plane direction it is significantly reduced by >35%. Similarly, the variation of damping in both perforated and nonperforated beams, too, is thoroughly analyzed for the first few modes of vibration. Nevertheless, their frequency response variation of <10% for modal frequencies in both planar and out-of-plane directions as compared to the nonperforated counterparts, points to potential applications in several micro-systems including those based on comb drives.

Figures in this Article
© 2014 Society of Photo-Optical Instrumentation Engineers

Citation

Kenkere Balashanthamurthy Mruthyunjaya Swamy ; Banibrata Mukherjee ; Zishan Ali Syed Mohammed ; Suman Chakraborty and Siddhartha Sen
"Performance evaluation of perforated micro-cantilevers for MEMS applications", J. Micro/Nanolith. MEMS MOEMS. 13(2), 023001 (Apr 09, 2014). ; http://dx.doi.org/10.1117/1.JMM.13.2.023001


Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

PubMed Articles
Design considerations and performance of MEMS acoustoelectric ultrasound detectors. IEEE Trans Ultrason Ferroelectr Freq Control 2013;60(9):1906-16.
Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.