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Electromechanical resonators based on electrospun ZnO nanofibers

[+] Author Affiliations
Somayeh Fardindoost

Sharif University of Technology, Institute for Nanoscience and Nanotechnology, Azadi Street, 11155-8639 Tehran, Iran

Saeed Mohammadi

Stanford University, Stanford Center for Cancer Nanotechnology Excellence, Stanford School of Medicine, Department of Radiology, Palo Alto, California, United States

Azam Iraji zad

Sharif University of Technology, Institute for Nanoscience and Nanotechnology, Azadi Street, 11155-8639 Tehran, Iran

Sharif University of Technology, Department of Physics, Azadi Street, 11365-9161 Tehran, Iran

Reza Sarvari

Sharif University of Technology, Department of Electrical Engineering, Azadi Street, 11365-9163 Tehran, Iran

Seyed Peyman Shariatpanahi

University of Tehran, Faculty of New Sciences and Technologies, 14395-1374 Tehran, Iran

J. Micro/Nanolith. MEMS MOEMS. 13(4), 043011 (Nov 11, 2014). doi:10.1117/1.JMM.13.4.043011
History: Received March 17, 2014; Revised September 2, 2014; Accepted September 25, 2014
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Abstract.  We present fabrication, characterization, and experimental results describing electrical actuation and readout of the mechanical vibratory response of electrospun ZnO nanofibers. For a fiber with an approximate radius of 200 nm and a length of 70μm, a resonance frequency around 3.62 MHz with a quality factor (Q) of about 235 in air at ambient conditions is observed. It is shown that the measured frequency of the resonance is consistent with results from finite element simulations. Also, the measurements were performed in an enclosed chamber with controlled levels of ethanol vapor. The adsorption of ethanol causes a shift in the resonance frequency of the fibers, which can be related to the concentration of ethanol vapor for sensing purposes.

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© 2014 Society of Photo-Optical Instrumentation Engineers

Citation

Somayeh Fardindoost ; Saeed Mohammadi ; Azam Iraji zad ; Reza Sarvari and Seyed Peyman Shariatpanahi
"Electromechanical resonators based on electrospun ZnO nanofibers", J. Micro/Nanolith. MEMS MOEMS. 13(4), 043011 (Nov 11, 2014). ; http://dx.doi.org/10.1117/1.JMM.13.4.043011


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