Lithography

Computational study of directed self-assembly for contact-hole shrink and multiplication

[+] Author Affiliations
Tatsuhiro Iwama, Nabil Laachi, Kris T. Delaney, Glenn H. Fredrickson

University of California, Materials Research Laboratory, Santa Barbara 93106, United States

J. Micro/Nanolith. MEMS MOEMS. 14(1), 013501 (Jan 06, 2015). doi:10.1117/1.JMM.14.1.013501
History: Received September 8, 2014; Accepted December 2, 2014
Text Size: A A A

Abstract.  We use three-dimensional self-consistent field theory (SCFT) to study the directed self-assembly (DSA) of cylinder-forming block copolymers in a peanut-shaped (also called egg-box) prepattern. The design of the prepattern shape will target the pitch reduction of the contact holes. The idea is that the DSA of block copolymers will not only lead to reduced critical dimensions relative to the template but will also repair defects in the guiding prepatterns and produce defect-free contact holes. We also study blends of block copolymers and homopolymers with various lengths and volume fractions. Using SCFT simulations, we establish the effects of the added homopolymer on defectivity, the process window, and the properties of the formed cylinders. In an attempt to quantify the effect of thermal fluctuations on the placement of the cylinders, we resort to complex Langevin simulations and perform a stochastic sampling of the assembled morphologies.

Figures in this Article
© 2015 Society of Photo-Optical Instrumentation Engineers

Citation

Tatsuhiro Iwama ; Nabil Laachi ; Kris T. Delaney and Glenn H. Fredrickson
"Computational study of directed self-assembly for contact-hole shrink and multiplication", J. Micro/Nanolith. MEMS MOEMS. 14(1), 013501 (Jan 06, 2015). ; http://dx.doi.org/10.1117/1.JMM.14.1.013501


Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.