Subresolution assist features in extreme ultraviolet lithography

Deniz Civay; Erik A. Verduijn; Chris H. Clifford; Pawitter J. Mangat; Thomas I. Wallow

doi:10.1117/1.JMM.14.2.023501

2 April 2015 Subresolution assist features in extreme ultraviolet lithography

Deniz Civay, Erik A. Verduijn, Chris H. Clifford, Pawitter J. Mangat, Thomas I. Wallow

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 14, Issue 2, 023501 (April 2015). https://doi.org/10.1117/1.JMM.14.2.023501

Abstract

Lithographic critical dimension (CD) printing variability can be easily captured with a CD uniformity measurement; however, minimizing the variability is a challenging task that requires manipulation of many variables. Contact hole variability has a direct impact on device performance, while via variability affects metal area scaling and design. Subresolution assist features (SRAFs) have been used in the past to improve lithographic printing variability. SRAFs enhance the image log slope of nearby features but are not intended to print themselves. The role of SRAFs in extreme ultraviolet is explored here.

Citation Download Citation

Deniz Civay, Erik A. Verduijn, Chris H. Clifford, Pawitter J. Mangat, and Thomas I. Wallow "Subresolution assist features in extreme ultraviolet lithography," Journal of Micro/Nanolithography, MEMS, and MOEMS 14(2), 023501 (2 April 2015). https://doi.org/10.1117/1.JMM.14.2.023501

Published: 2 April 2015

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available