Lithography

Subresolution assist features in extreme ultraviolet lithography

[+] Author Affiliations
Deniz Civay, Pawitter Mangat

GlobalFoundries, 400 Stonebreak Road Extension, Malta, New York 12020, United States

Erik Verduijn

GlobalFoundries, Leuven, Belgium

Chris Clifford, Tom Wallow

GlobalFoundries, Sunnyvale, California, United States

J. Micro/Nanolith. MEMS MOEMS. 14(2), 023501 (Apr 02, 2015). doi:10.1117/1.JMM.14.2.023501
History: Received March 24, 2014; Accepted March 4, 2015
Text Size: A A A

Abstract.  Lithographic critical dimension (CD) printing variability can be easily captured with a CD uniformity measurement; however, minimizing the variability is a challenging task that requires manipulation of many variables. Contact hole variability has a direct impact on device performance, while via variability affects metal area scaling and design. Subresolution assist features (SRAFs) have been used in the past to improve lithographic printing variability. SRAFs enhance the image log slope of nearby features but are not intended to print themselves. The role of SRAFs in extreme ultraviolet is explored here.

© 2015 Society of Photo-Optical Instrumentation Engineers

Citation

Deniz Civay ; Erik Verduijn ; Chris Clifford ; Pawitter Mangat and Tom Wallow
"Subresolution assist features in extreme ultraviolet lithography", J. Micro/Nanolith. MEMS MOEMS. 14(2), 023501 (Apr 02, 2015). ; http://dx.doi.org/10.1117/1.JMM.14.2.023501


Tables

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.