Intrafield overlay correction for illumination-based distortion

Michael Pike; Timothy Brunner; Bradley Morgenfeld; Nan Jing; Timothy Wiltshire

doi:10.1117/1.JMM.15.2.021406

2 May 2016 Intrafield overlay correction for illumination-based distortion

Michael Pike, Timothy Brunner, Bradley Morgenfeld, Nan Jing, Timothy Wiltshire

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 15, Issue 2, 021406 (May 2016). https://doi.org/10.1117/1.JMM.15.2.021406

Abstract

The use of different illumination source shapes and multipatterning processes used to generate sub–40-nm images can create image placement errors level to level, resulting in significant intrafield overlay errors. These errors arise because of the impact of the different pupil shapes on lens aberrations resolving into image placement errors as well as because different tools will react differently to the same pupil shapes. We compare the impact of two extreme illumination sources on intrafield image placement and its effect on overall pattern overlay. We also discuss a method to empirically isolate and measure the amount of intrafield overlay distortion relative to a reference illumination source and then use the results to correct the resultant image placement errors.

Citation Download Citation

Michael Pike, Timothy Brunner, Bradley Morgenfeld, Nan Jing, and Timothy Wiltshire "Intrafield overlay correction for illumination-based distortion," Journal of Micro/Nanolithography, MEMS, and MOEMS 15(2), 021406 (2 May 2016). https://doi.org/10.1117/1.JMM.15.2.021406

Published: 2 May 2016

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available