Key components technology update of the 250W high-power LPP-EUV light source

Yasufumi Kawasuji; Krzysztof M. Nowak; Tsukasa Hori; Takeshi Okamoto; Hiroshi Tanaka; Yukio Watanabe; Tamotsu Abe; Takeshi Kodama; Hiroaki Nakarai; Taku Yamazaki; Shinji Okazaki; Takashi Saitou; Hakaru Mizoguchi; Yutaka Shiraishi

doi:10.1117/12.2257808

24 March 2017 Key components technology update of the 250W high-power LPP-EUV light source

Yasufumi Kawasuji, Krzysztof M. Nowak, Tsukasa Hori, Takeshi Okamoto, Hiroshi Tanaka, Yukio Watanabe, Tamotsu Abe, Takeshi Kodama, Hiroaki Nakarai, Taku Yamazaki, Shinji Okazaki, Takashi Saitou, Hakaru Mizoguchi, Yutaka Shiraishi

Author Affiliations +

Proceedings Volume 10143, Extreme Ultraviolet (EUV) Lithography VIII; 101432G (2017) https://doi.org/10.1117/12.2257808
Event: SPIE Advanced Lithography, 2017, San Jose, California, United States

Abstract

13.5nm wavelength, CO₂-Sn-LPP EUV light source which is the most promising solution for the source capable of enabling high-volume-manufacturing of semiconductor devices with critical layers patterned with sub-10nm resolution. Our source incorporates unique and original technologies such as; high power short pulse CO₂ laser, short wavelength solid-state pre-pulse laser, highly stabilized droplet generator, a laser-droplet shooting control system and debris mitigation technology utilizing a strong magnetic field. In this paper we present a technology update on the key components of our 250W CO₂-Sn-LPP EUV light source.

Citation Download Citation

Yasufumi Kawasuji, Krzysztof M. Nowak, Tsukasa Hori, Takeshi Okamoto, Hiroshi Tanaka, Yukio Watanabe, Tamotsu Abe, Takeshi Kodama, Hiroaki Nakarai, Taku Yamazaki, Shinji Okazaki, Takashi Saitou, Hakaru Mizoguchi, and Yutaka Shiraishi "Key components technology update of the 250W high-power LPP-EUV light source", Proc. SPIE 10143, Extreme Ultraviolet (EUV) Lithography VIII, 101432G (24 March 2017); https://doi.org/10.1117/12.2257808

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available