Block copolymers with a fluoro-block for 5 nm DSA patterning application

Xuemiao Li; Zhilong Li; Le Dai; Hui Cao; Hai Deng

doi:10.1117/12.2543121

23 March 2020 Block copolymers with a fluoro-block for 5 nm DSA patterning application

Xuemiao Li, Zhilong Li, Le Dai, Hui Cao, Hai Deng

Proceedings Volume 11326, Advances in Patterning Materials and Processes XXXVII; 113261E (2020) https://doi.org/10.1117/12.2543121
Event: SPIE Advanced Lithography, 2020, San Jose, California, United States

Abstract

In this manuscript, various fluorine-containing BCPs were synthesized by living anionic polymerization or reversible addition−fragmentation chain-transfer (RAFT) polymerization. The resulted BCPs showed high χ value > 0.2. With similar χ value, we observed that PS-typed BCPs formed microdomains of 5 nm within 1 min at 80°C, whereas polymethacrylate-typed ones required 1 h annealing at 160°C. When rigid side chain was incorporated into the polymethacrylate block, the annealing time can be shortened to 5 min at 160°C. However, the poor film formation of the such BCP with rod-like side chain resulted in rough line pattern after the thermal annealing process. The polymethacrylate-typed BCPs generally requires high boiling point solvents for better film formation and better line patterning.

Citation Download Citation

Xuemiao Li, Zhilong Li, Le Dai, Hui Cao, and Hai Deng "Block copolymers with a fluoro-block for 5 nm DSA patterning application", Proc. SPIE 11326, Advances in Patterning Materials and Processes XXXVII, 113261E (23 March 2020); https://doi.org/10.1117/12.2543121

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available