Effects of off-axis illumination and scattering-bar optical proximity correction on the impact of lens aberration on 130-nm polygate mask: a simulation study

Kent H. Nakagawa; Uwe Hollerbach; J. Fung Chen

doi:10.1117/12.388999

5 July 2000 Effects of off-axis illumination and scattering-bar optical proximity correction on the impact of lens aberration on 130-nm polygate mask: a simulation study

Kent H. Nakagawa, Uwe Hollerbach, J. Fung Chen

Author Affiliations +

Proceedings Volume 4000, Optical Microlithography XIII; (2000) https://doi.org/10.1117/12.388999
Event: Microlithography 2000, 2000, Santa Clara, CA, United States

Abstract

A simulation study has been performed to look at improving the imaging of a 130nm poly gate mask design. For this lithography process, we have chosen 6 percent attenuated PSM applied with scattering-bar optical proximity correction (SB-OPC) using 248 nm exposure wavelength. We compare the process window performance of off-axis illuminations (OAI) such as QUASAR and annular to a conventional on-axis illumination. Sampled lens aberrations were introduced to the simulation model to evaluate the impact of illumination settings. Simulations show benefits of combining SB-OPC technology with OAI on the performance of 130nm poly gate line features in the presence of known lens aberrations. For this simulation study, we have used our WaveMaster software tool to automate the SOLID-C simulation loops that includes multiple pre-selected line features form an actual poly gate mask design, five different lens aberration Zernike data sets, and three illumination settings.

Citation Download Citation

Kent H. Nakagawa, Uwe Hollerbach, and J. Fung Chen "Effects of off-axis illumination and scattering-bar optical proximity correction on the impact of lens aberration on 130-nm polygate mask: a simulation study", Proc. SPIE 4000, Optical Microlithography XIII, (5 July 2000); https://doi.org/10.1117/12.388999

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available