MEMS structure: micromirror array

Martin Huja; Miroslav Husak

doi:10.1117/12.382325

10 April 2000 MEMS structure: micromirror array

Martin Huja, Miroslav Husak

Proceedings Volume 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS; (2000) https://doi.org/10.1117/12.382325
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, 2000, Paris, France

Abstract

The core of the project has been to design a moveable micro mirror array with the most optimal dependence of the optically active area, the deflection angles and the micro mirror power consumption, while keeping the cost of the chip as low as possible. The matrix of 20 X 20 micromirrors uses an electrostatically actuated principle. The array is designed using the Three Layer Polysilicon Surface Micro machining Process technology. Each micro mirror has two torsion springs and the size of the reflected plate is 70 X 70 micrometers . The penetration of the reflected micro mirror array is about 70 percent. The micro mirror array is addressed by 36 pads that are connected to the top and bottom electrodes. Potential connected between electrodes is used for the actuation of micro mirror. For the first step, we have designed 20 types of micromirrors, which differ in geometrical sizes and thickness of the micro mirror plates. The dilation angle of the micro mirror is 1.7 or 2.3 degrees defending on the type of the micro mirror.

Citation Download Citation

Martin Huja and Miroslav Husak "MEMS structure: micromirror array", Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); https://doi.org/10.1117/12.382325

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available