MEMS 3D scan mirror

Yuhe Shao; David L. Dickensheets

doi:10.1117/12.523902

24 January 2004 MEMS 3D scan mirror

Yuhe Shao, David L. Dickensheets

Proceedings Volume 5348, MOEMS Display and Imaging Systems II; (2004) https://doi.org/10.1117/12.523902
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States

Abstract

A 1500-μm-diameter silicon/silicon nitride 3D scan mirror has been built using MEMS technology. It is capable of static and dynamic beam scanning achieved with a bi-axial gimbal. A gold-coated deformable membrane at the center of the device provides both focus control (z-axis) and spherical aberration correction. This architecture is able to move the focus of a laser beam throughout a three-dimensional space with a single optical surface, and is referred as a 3D scan mirror. This mirror will be incorporated into a miniature confocal laser scanning microscope for biomedical in-situ imaging applications. In this paper we describe the 3D scan mirror design, fabrication and characterization as well as its target application.

Citation Download Citation

Yuhe Shao and David L. Dickensheets "MEMS 3D scan mirror", Proc. SPIE 5348, MOEMS Display and Imaging Systems II, (24 January 2004); https://doi.org/10.1117/12.523902

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