Development of spin-on hard mask materials under resist in nano imprint lithography

Satoshi Takei; Tsuyoshi Ogawa; Ryan Deschner; Kane Jen; Makoto Hanabata; C. Grant Willson

doi:10.1117/12.853200

30 March 2010 Development of spin-on hard mask materials under resist in nano imprint lithography

Satoshi Takei, Tsuyoshi Ogawa, Ryan Deschner, Kane Jen, Makoto Hanabata, C. Grant Willson

Proceedings Volume 7639, Advances in Resist Materials and Processing Technology XXVII; 76391C (2010) https://doi.org/10.1117/12.853200
Event: SPIE Advanced Lithography, 2010, San Jose, California, United States

Abstract

Nanoimprint lithography is a newly developed patterning method that employs a hard template for the patterning of structures at micron and nanometerscales. This technique has many advantages such as cost reduction, high resolution, low line edge roughness (LER), and easy operation. However, resist peeling, defects, low degree of planarization, and low throughput issues present challenges that must be resolved in order to mass produce advanced nanometer-scale devices. In this study, the new approach of using spin-on hard mask materials under the resist to modify its adhesion during a UV irradiation process in nano imprint lithography was proposed to increase process latitudes. The performance of this process is evaluated by using step and flash imprint lithography. We expect that these spin-on hard mask materials (NCI-NIL-U series) under organic resist will be one of the most promising materials in the next generation of nano imprint lithography.

Citation Download Citation

Satoshi Takei, Tsuyoshi Ogawa, Ryan Deschner, Kane Jen, Makoto Hanabata, and C. Grant Willson "Development of spin-on hard mask materials under resist in nano imprint lithography", Proc. SPIE 7639, Advances in Resist Materials and Processing Technology XXVII, 76391C (30 March 2010); https://doi.org/10.1117/12.853200

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available