Dr. Stephen F. Horne
Senior Scientist at Energetiq Technology Inc
SPIE Involvement:
Author
Publications (10)

SPIE Journal Paper | 21 May 2012
Matthew Partlow, Matthew Besen, Paul Blackborow, Ron Collins, Deborah Gustafson, Stephen Horne, Donald Smith
JM3, Vol. 11, Issue 02, 021105, (May 2012) https://doi.org/10.1117/12.10.1117/1.JMM.11.2.021105
KEYWORDS: Extreme ultraviolet, Plasma, Light sources, Photomasks, Metrology, Inspection, Modulators, Xenon, Extreme ultraviolet lithography, Magnetism

Proceedings Article | 23 March 2012 Paper
Stephen Horne, Matthew Partlow, Deborah Gustafson, Matthew Besen, Donald Smith, Paul Blackborow
Proceedings Volume 8322, 83222M (2012) https://doi.org/10.1117/12.916476
KEYWORDS: Plasma, Inspection, Extreme ultraviolet, Xenon, Photomasks, Physics, Light sources, Extreme ultraviolet lithography, Pulsed laser operation, Data modeling

Proceedings Article | 14 October 2011 Paper
Deborah Gustafson, Stephen Horne, Matthew Partlow, Matthew Besen, Donald Smith, Paul Blackborow
Proceedings Volume 8166, 81662U (2011) https://doi.org/10.1117/12.899141
KEYWORDS: Plasma, Extreme ultraviolet, Metrology, Photomasks, Modulators, Inspection, Light sources, Magnetism, Copper, Xenon

Proceedings Article | 8 April 2011 Paper
Stephen Horne, Deborah Gustafson, Matthew Partlow, Matthew Besen, Donald Smith, Paul Blackborow
Proceedings Volume 7969, 79692Z (2011) https://doi.org/10.1117/12.880794
KEYWORDS: Extreme ultraviolet, Plasma, Modulators, Metrology, Extreme ultraviolet lithography, Xenon, Diodes, Chaos, Switches, Light sources

Proceedings Article | 28 April 2010 Paper
Stephen Horne, Don Smith, Matthew Besen, Matthew Partlow, Daniil Stolyarov, Huiling Zhu, William Holber
Proceedings Volume 7680, 76800L (2010) https://doi.org/10.1117/12.850269
KEYWORDS: Lamps, Plasma, Xenon, Physics, Vacuum ultraviolet, Electrodes, Ultraviolet radiation, Semiconductor lasers, Infrared imaging, Laser optics

Showing 5 of 10 publications
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