Study on three-dimensional shape measurement of partially diffuse and specular reflective surfaces with fringe projection technique and fringe reflection technique

Lei Huang; Anand Asundi

doi:10.1117/12.891876

29 August 2011 Study on three-dimensional shape measurement of partially diffuse and specular reflective surfaces with fringe projection technique and fringe reflection technique

Lei Huang, Anand Asundi

Author Affiliations +

Proceedings Volume 8133, Dimensional Optical Metrology and Inspection for Practical Applications; 813304 (2011) https://doi.org/10.1117/12.891876
Event: SPIE Optical Engineering + Applications, 2011, San Diego, California, United States

Abstract

Three-dimensional shape metrology using fringe projection technique and fringe reflection technique are effective ways to reconstruct three-dimensional shape for surfaces with different reflectance properties. Fringe projection technique is used for measuring objects with diffuse surfaces and relies on the principle of triangulation, while fringe reflectometry is used for specular reflective specimens based on principle of reflection. While fringe projection directly provides the profile, fringe reflectometry measures the slope of the surface from which the profile is integrated. In this study, the performance of these two fringe based techniques are investigated in relation to sensitivity and accuracy.

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Lei Huang and Anand Asundi "Study on three-dimensional shape measurement of partially diffuse and specular reflective surfaces with fringe projection technique and fringe reflection technique", Proc. SPIE 8133, Dimensional Optical Metrology and Inspection for Practical Applications, 813304 (29 August 2011); https://doi.org/10.1117/12.891876

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