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Abdullah Hyder
at Columbia Univ.
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Publications (1)
Proceedings Article | 28 April 2023 Poster + Paper
Kinetic simulations of plasma dynamics in the EUV sources
Kirill Lezhnin, Samuel Totorica, Abdullah Hyder, John Sheil, Oscar Versolato, Ahmed Diallo, William Fox
Proceedings Volume 12494, 1249418 (2023) https://doi.org/10.1117/12.2658454
KEYWORDS: Simulations, Plasma, Ions, Extreme ultraviolet, Laser radiation, Pulsed laser operation, Electrons, Tin, Extreme ultraviolet lithography, Solids
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